Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734206 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li | 2020-08-04 |
| 10559453 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li | 2020-02-11 |