Issued Patents 2020
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876976 | Apparatus and method for substrate inspection | Bo-Han Shih, Sheng-Hsiang Chuang, Hsu-Shui Liu, Shou-Wen Kuo | 2020-12-29 |
| 10872794 | Automatic in-line inspection system | Chien-Ko Liao, Hsu-Shui Liu, Sheng-Hsiang Chuang, Shou-Wen Kuo, Ya Hsun Hsueh | 2020-12-22 |
| 10861723 | EFEM robot auto teaching methodology | Chien-Fa Lee, Hsu-Shui Liu, Shou-Wen Kuo | 2020-12-08 |
| 10854490 | Wafer carrier handling apparatus and method thereof | Tsung-Sheng Kuo, Chih-Hung Huang, Ming-Hsien Tsai, Yang-Ann Chu, Hsuan Lee | 2020-12-01 |
| 10852704 | Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium | Sing-Tsung Li, Hsu-Shui Liu, Sheng-Hsiang Chuang, Shou-Wen Kuo, Chien-Ko Liao | 2020-12-01 |
| 10839507 | Defect offset correction | Chien-Ko Liao, Ya Hsun Hsueh, Sheng-Hsiang Chuang, Hsu-Shui Liu, Shou-Wen Kuo | 2020-11-17 |
| 10822181 | Systems and methods for die transfer | Tsung-Sheng Kuo, Chih-Hung Huang, Yi-Fam Shiu, Chueng-Jen Wang, Hsuan Lee | 2020-11-03 |
| 10734206 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Shou-Wen Kuo, Sing-Tsung Li | 2020-08-04 |
| 10714364 | Apparatus and method for inspecting wafer carriers | Cheng-Kang Hu, Shou-Wen Kuo, Sheng-Hsiang Chuang, Hsu-Shui Liu | 2020-07-14 |
| 10665507 | Automated transfer and drying tool for process chamber | Tsung-Sheng Kuo, Hsu-Shui Liu, Shou-Wen Kuo, Yang-Ann Chu | 2020-05-26 |
| 10665489 | Integrated chip die carrier exchanger | Chien-Fa Lee, Hsu-Shui Liu, Pin-Yi Hsin, Shou-Wen Kuo, Patrick Lin | 2020-05-26 |
| 10622236 | Apparatus and method for handling wafer carrier doors | Tsung-Sheng Kuo, Yang-Ann Chu, Alan Yang, Vic Huang, Hsu-Shui Liu | 2020-04-14 |
| 10559453 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Shou-Wen Kuo, Sing-Tsung Li | 2020-02-11 |