Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852704 | Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium | Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Shou-Wen Kuo, Chien-Ko Liao | 2020-12-01 |
| 10734206 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo | 2020-08-04 |
| 10559453 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo | 2020-02-11 |