Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866525 | Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device | Ru-Gun Liu, Hsu-Ting Huang, Kenji Yamazoe, Minfeng Chen, Shuo-Yen Chou +1 more | 2020-12-15 |
| 10867112 | Methods of making mask using transmission cross coefficient (TCC) matrix of lithography process optical system | Hsu-Ting Huang, Ru-Gun Liu | 2020-12-15 |
| 10831094 | Pellicle for EUV mask and fabrication thereof | Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2020-11-10 |
| 10747097 | Mask with multilayer structure and manufacturing method by using the same | Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2020-08-18 |
| 10691014 | Extreme ultraviolet lithography system, device, and method for printing low pattern density features | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2020-06-23 |
| 10684552 | Method to mitigate defect printability for ID pattern | Yen-Cheng Lu, Chia-Hao Hsu, Chia-Chen Chen, Jeng-Horng Chen, Anthony Yen | 2020-06-16 |