Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866505 | Mask process correction | Ru-Gun Liu | 2020-12-15 |
| 10866506 | Photo mask data correction method | Fu An Tien, Ru-Gun Liu | 2020-12-15 |
| 10866525 | Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device | Shinn-Sheng Yu, Ru-Gun Liu, Kenji Yamazoe, Minfeng Chen, Shuo-Yen Chou +1 more | 2020-12-15 |
| 10867112 | Methods of making mask using transmission cross coefficient (TCC) matrix of lithography process optical system | Ru-Gun Liu, Shinn-Sheng Yu | 2020-12-15 |