Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10691014 | Extreme ultraviolet lithography system, device, and method for printing low pattern density features | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2020-06-23 |
| 10684552 | Method to mitigate defect printability for ID pattern | Chia-Hao Hsu, Shinn-Sheng Yu, Chia-Chen Chen, Jeng-Horng Chen, Anthony Yen | 2020-06-16 |