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And noise based care areas |
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Generating high resolution images from low resolution images for semiconductor applications |
Saurabh Sharma, Amitoz Singh Dandiana, Mohan Mahadevan, Chao Fang, Amir Azordegan |
2020-09-08 |
| 10713769 |
Active learning for defect classifier training |
Jing Zhang, Yujie Dong, Richard Wallingford, Michael Daino, Kris Bhaskar |
2020-07-14 |
| 10699926 |
Identifying nuisances and defects of interest in defects detected on a wafer |
Martin Plihal, Mike VonDenHoff, Andrew Cross, Kaushik Sah, Antonio Mani |
2020-06-30 |
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Automated pattern fidelity measurement plan generation |
Ajay Gupta, Thanh Huy Ha |
2020-06-02 |
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Hybrid inspection system for efficient process window discovery |
— |
2020-02-04 |
| 10539612 |
Voltage contrast based fault and defect inference in logic chips |
— |
2020-01-21 |