Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854511 | Methods of lowering wordline resistance | Yihong Chen, Yong Wu, Chia Cheng Chin, Xinliang Lu, Srinivas Gandikota +1 more | 2020-12-01 |
| 10840186 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Abhijit Basu Mallick, Praburam Gopalraja | 2020-11-17 |
| 10811303 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Abhijit Basu Mallick +1 more | 2020-10-20 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Pramit Manna, Yihong Chen, Rui Cheng, Shishi Jiang | 2020-09-22 |
| 10770349 | Critical dimension control for self-aligned contact patterning | Abhijit Basu Mallick | 2020-09-08 |
| 10699952 | Deposition and treatment of films for patterning | Atashi Basu, Abhijit Basu Mallick, Srinivas Gandikota | 2020-06-30 |
| 10636659 | Selective deposition for simplified process flow of pillar formation | Yihong Chen, Yong Wu, Abhijit Basu Mallick, Srinivas Gandikota | 2020-04-28 |
| 10622251 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Abhijit Basu Mallick, Kelvin Chan | 2020-04-14 |
| 10559497 | Seamless tungsten fill by tungsten oxidation-reduction | Yong Wu, Yihong Chen, Shishi Jiang, Abhijit Basu Mallick, Srinivas Gandikota | 2020-02-11 |