Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840186 | Methods of forming self-aligned vias and air gaps | Ziqing Duan, Abhijit Basu Mallick, Praburam Gopalraja | 2020-11-17 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna | 2020-08-11 |
| 10622221 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Srinivas Gandikota, Yingli Rao, Regina Freed +1 more | 2020-04-14 |
| 10600684 | Ultra-thin diffusion barriers | Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota | 2020-03-24 |
| 10529568 | PECVD tungsten containing hardmask films and methods of making | Pramit Manna, Rui Cheng, Abhijit Basu Mallick | 2020-01-07 |