| 10854491 |
Dynamic leveling process heater lift |
Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, William T. Weaver, Gregory John Freeman |
2020-12-01 |
| 10854483 |
High pressure steam anneal processing apparatus |
Jason M. Schaller, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin, David Blahnik +1 more |
2020-12-01 |
| 10831112 |
Reticle processing system |
James D. Strassner, Charles T. Carlson, Jeffrey Blahnik |
2020-11-10 |
| 10699930 |
Buffer chamber wafer heating mechanism and supporting robots |
William T. Weaver, Jason M. Schaller, David Blahnik, Benjamin B. Riordon, Paul E. Pergande |
2020-06-30 |
| 10643867 |
Annealing system and method |
Jean Delmas, Charles T. Carlson |
2020-05-05 |
| 10597779 |
Susceptor position and rational apparatus and methods of use |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller |
2020-03-24 |
| 10586720 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Malcolm N. Daniel, JR. +1 more |
2020-03-10 |
