Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879086 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Takeshi Sakurai, Eiji Hirai, Kaoru Hamaura, Koji Maruyama | 2020-12-29 |
| 10847407 | Substrate holding apparatus | Naoki Toyomura | 2020-11-24 |
| 10575697 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Junji Kunisawa | 2020-03-03 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |
| 10546764 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Junji Kunisawa, Shunsuke Matsuzawa | 2020-01-28 |