Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10575697 | Substrate cleaning apparatus and substrate processing apparatus | Junji Kunisawa, Mitsuru Miyazaki | 2020-03-03 |
| 10546764 | Substrate cleaning apparatus and substrate processing apparatus | Mitsuru Miyazaki, Junji Kunisawa, Shunsuke Matsuzawa | 2020-01-28 |