Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741423 | Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate | Hisajiro Nakano | 2020-08-11 |
| 10575697 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Mitsuru Miyazaki | 2020-03-03 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |
| 10546764 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Mitsuru Miyazaki, Shunsuke Matsuzawa | 2020-01-28 |