Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818531 | Substrate transport system, substrate processing apparatus, hand position adjustment method | Haiyang Xu, Koji Maeda, Mitsuhiko Inaba | 2020-10-27 |
| 10792782 | Polishing-amount simulation method for buffing, and buffing apparatus | Itsuki Kobata, Toshio Mizuno | 2020-10-06 |
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima, Kenji Shinkai +5 more | 2020-06-23 |
| 10618140 | Substrate processing system and substrate processing method | — | 2020-04-14 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Hiroshi Aono, Tetsuya Yashima, Hidetatsu Isokawa +6 more | 2020-02-25 |