Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Kuniaki Yamaguchi, Koji Maeda, Tetsuya Yashima, Kenji Shinkai +5 more | 2020-06-23 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima, Hidetatsu Isokawa +6 more | 2020-02-25 |