Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10688622 | Substrate processing apparatus | Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima, Kenji Shinkai +5 more | 2020-06-23 |
| 10576604 | Substrate polishing apparatus | Hiroyuki Shinozaki, Tadakazu Sone, Kenji Shinkai, Hideo Aizawa | 2020-03-03 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Tetsuya Yashima, Hidetatsu Isokawa +6 more | 2020-02-25 |