Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870183 | Substrate processing apparatus | — | 2020-12-22 |
| 10777417 | Dressing device, polishing apparatus, holder, housing and dressing method | — | 2020-09-15 |
| 10688620 | Polishing apparatus | Yuta Suzuki, Taro Takahashi, Seiji Katsuoka, Masahiro Hatakeyama | 2020-06-23 |
| 10675731 | Method of monitoring a dressing process and polishing apparatus | — | 2020-06-09 |
| 10661409 | Substrate cleaning apparatus, substrate processing apparatus, and substrate cleaning method | — | 2020-05-26 |
| 10636665 | Dressing device, polishing apparatus, holder, housing and dressing method | — | 2020-04-28 |
| 10625395 | Substrate polishing apparatus | — | 2020-04-21 |
| 10576604 | Substrate polishing apparatus | Hiroshi Aono, Tadakazu Sone, Kenji Shinkai, Hideo Aizawa | 2020-03-03 |
| 10537975 | Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus | Makoto Fukushima, Osamu Nabeya | 2020-01-21 |