Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792782 | Polishing-amount simulation method for buffing, and buffing apparatus | Kuniaki Yamaguchi, Toshio Mizuno | 2020-10-06 |
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2020-05-26 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa +2 more | 2020-02-11 |