Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792784 | Leak checking method, and computer-readable storage medium for performing the leak checking method | Nobuyuki Takahashi, Toru Maruyama | 2020-10-06 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa, Keita Yagi +2 more | 2020-02-11 |