Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792784 | Leak checking method, and computer-readable storage medium for performing the leak checking method | Suguru Sakugawa, Nobuyuki Takahashi | 2020-10-06 |
| 10710208 | Polishing method and polishing apparatus | Hisanori Matsuo, Yasuyuki Motoshima | 2020-07-14 |
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Nobuyuki Takahashi | 2020-05-26 |
| 10589398 | Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program | Yohei Eto | 2020-03-17 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa, Keita Yagi +2 more | 2020-02-11 |