Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Toru Maruyama, Nobuyuki Takahashi, Yoichi Shiokawa, Keita Yagi +2 more | 2020-02-11 |