Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Toru Maruyama, Nobuyuki Takahashi | 2020-05-26 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Keita Yagi +2 more | 2020-02-11 |