Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818531 | Substrate transport system, substrate processing apparatus, hand position adjustment method | Kuniaki Yamaguchi, Koji Maeda, Mitsuhiko Inaba | 2020-10-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818531 | Substrate transport system, substrate processing apparatus, hand position adjustment method | Kuniaki Yamaguchi, Koji Maeda, Mitsuhiko Inaba | 2020-10-27 |