| 10854483 |
High pressure steam anneal processing apparatus |
Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin, David Blahnik +1 more |
2020-12-01 |
| 10854491 |
Dynamic leveling process heater lift |
Michael Paul Rohrer, Tuan Nguyen, William T. Weaver, Gregory John Freeman, Robert Brent Vopat |
2020-12-01 |
| 10739208 |
Semiconductor workpiece temperature measurement system |
Klaus Petry, Ala Moradian, Morgan Evans |
2020-08-11 |
| 10699930 |
Buffer chamber wafer heating mechanism and supporting robots |
William T. Weaver, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande |
2020-06-30 |
| 10597779 |
Susceptor position and rational apparatus and methods of use |
William T. Weaver, Robert Brent Vopat, Joseph Yudovsky |
2020-03-24 |
| 10586720 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
William T. Weaver, Joseph Yudovsky, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2020-03-10 |
