Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroshi Marumoto, Takuro Masuzumi +2 more | 2020-06-23 |
| 10651061 | Substrate processing apparatus, substrate processing method and recording medium | Takao Inada, Hisashi Kawano | 2020-05-12 |