Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858727 | High density, low stress amorphous carbon film, and process and equipment for its deposition | Jingjing Liu, Zhong Qiang Hua, Michael W. Stowell, Srinivas D. Nemani, Chentsau Ying +3 more | 2020-12-08 |
| 10811257 | Techniques for forming low stress etch-resistant mask using implantation | Rajesh Prasad, Tzu-Yu Liu, Kyu-Ha Shim, Tom Ho Wing Yu, Zhong Qiang Hua +3 more | 2020-10-20 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang, Xianmin Tang +8 more | 2020-09-01 |
| 10563304 | Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers | Xiangjin Xie, Xianmin Tang, Goichi Yoshidome | 2020-02-18 |
| 10541169 | Method and system for balancing the electrostatic chucking force on a substrate | Chong Jiang, Lei Jing, Mingte Liu, Michael W. Johnson, Pallavi Zhang +1 more | 2020-01-21 |