Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Ralf Zweering, Charles Seviour, Jens Prochnau, Marwene Nefzi +3 more | 2020-10-20 |
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Ralf Zweering, Steffen Fritzsche, Hendrik Wagner, Florian Ahles, Jens Prochnau +2 more | 2020-09-01 |
| 10571816 | Assembly in a microlithographic projection exposure apparatus | Jasper Wesselingh, Ansgar Holle, Stefan Troeger, Alexander Vogler | 2020-02-25 |