Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Ralf Zweering, Hendrik Wagner, Florian Ahles, Jens Prochnau, Michael Erath +2 more | 2020-09-01 |