Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Ralf Zweering, Steffen Fritzsche, Hendrik Wagner, Jens Prochnau, Michael Erath +2 more | 2020-09-01 |
| 10551747 | Device for changing a surface shape of an optical element via electron irradiation | Walter Pauls, Martin Weiser | 2020-02-04 |