Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Charles Seviour, Michael Erath, Jens Prochnau, Marwene Nefzi +3 more | 2020-10-20 |
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Steffen Fritzsche, Hendrik Wagner, Florian Ahles, Jens Prochnau, Michael Erath +2 more | 2020-09-01 |