Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809636 | Optical arrangement, in particular lithography system | Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau, Marwene Nefzi +3 more | 2020-10-20 |
| 10754132 | Imaging optical system for microlithography | Olaf Rogalsky, Sonja Schneider, Boris Bittner, Jens Kugler, Rolf Freimann | 2020-08-25 |
| 10571813 | Connection arrangement for a force-fit connection between ceramic components | Karsten Siegmanski, Peter Deufel, Viktor Kulitzki, Stefan Xalter | 2020-02-25 |