Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754132 | Imaging optical system for microlithography | Olaf Rogalsky, Boris Bittner, Jens Kugler, Bernhard Gellrich, Rolf Freimann | 2020-08-25 |
| 10591825 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Daniel Golde, Toralf Gruner, Johannes Ruoff, Norbert Wabra +1 more | 2020-03-17 |