Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754132 | Imaging optical system for microlithography | Olaf Rogalsky, Sonja Schneider, Boris Bittner, Jens Kugler, Bernhard Gellrich | 2020-08-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754132 | Imaging optical system for microlithography | Olaf Rogalsky, Sonja Schneider, Boris Bittner, Jens Kugler, Bernhard Gellrich | 2020-08-25 |