Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754132 | Imaging optical system for microlithography | Olaf Rogalsky, Sonja Schneider, Boris Bittner, Bernhard Gellrich, Rolf Freimann | 2020-08-25 |
| 10599051 | Projection exposure apparatus, and method for reducing deformations, resulting from dynamic accelerations, of components of the projection exposure apparatus | Stefan Hembacher, Erik Loopstra, Bernhard Geuppert | 2020-03-24 |