Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571816 | Assembly in a microlithographic projection exposure apparatus | Jasper Wesselingh, Michael Erath, Stefan Troeger, Alexander Vogler | 2020-02-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571816 | Assembly in a microlithographic projection exposure apparatus | Jasper Wesselingh, Michael Erath, Stefan Troeger, Alexander Vogler | 2020-02-25 |