Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732402 | Optical imaging arrangement with a piezoelectric device | Yim-Bun Patrick Kwan, Axel Lorenz | 2020-08-04 |
| 10571816 | Assembly in a microlithographic projection exposure apparatus | Michael Erath, Ansgar Holle, Stefan Troeger, Alexander Vogler | 2020-02-25 |