Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau +3 more | 2020-10-20 |
| 10732402 | Optical imaging arrangement with a piezoelectric device | Yim-Bun Patrick Kwan, Jasper Wesselingh | 2020-08-04 |