Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871715 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz +3 more | 2020-12-22 |
| 10656536 | Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Niek Elout De Kruijf, Mircea Dusa, Martijn Houben, Johannes Gerardus Maria Mulder +5 more | 2020-05-19 |
| 10599053 | Lithographic apparatus and method for loading a substrate | Thomas POIESZ | 2020-03-24 |
| 10527092 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Antonie Hendrik Verweij, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2020-01-07 |