Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705426 | Extraction body for lithographic apparatus | Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more | 2020-07-07 |
| 10599049 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Bas Johannes Petrus ROSET | 2020-03-24 |
| 10527092 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2020-01-07 |