Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10656536 | Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Niek Elout De Kruijf, Mircea Dusa, Martijn Houben, Johannes Gerardus Maria Mulder +5 more | 2020-05-19 |
| 10527092 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2020-01-07 |