Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599049 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Siegfried Alexander Tromp | 2020-03-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599049 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Siegfried Alexander Tromp | 2020-03-24 |