Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871715 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz, Johannes Adrianus Cornelis Maria Pijnenburg +3 more | 2020-12-22 |
| 10534270 | Lithography apparatus, a method of manufacturing a device and a control program | Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more | 2020-01-14 |