Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871715 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Laura Maria Fernandez Diaz, Johannes Adrianus Cornelis Maria Pijnenburg +3 more | 2020-12-22 |