Issued Patents 2019
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520811 | Resist composition and patterning process | Jun Hatakeyama | 2019-12-31 |
| 10520809 | Resist composition and patterning process | Jun Hatakeyama, Takeshi Sasami | 2019-12-31 |
| 10509314 | Resist composition and patterning process | Jun Hatakeyama | 2019-12-17 |
| 10495969 | Chemically amplified positive resist composition and resist pattern forming process | Masaaki Kotake, Keiichi Masunaga, Satoshi Watanabe | 2019-12-03 |
| 10474030 | Resist composition and patterning process | Jun Hatakeyama, Takeshi Sasami | 2019-11-12 |
| 10416558 | Positive resist composition, resist pattern forming process, and photomask blank | Keiichi Masunaga, Satoshi Watanabe, Masaaki Kotake | 2019-09-17 |
| 10363555 | Polymer compound for conductive polymer and method for producing the same | Jun Hatakeyama, Koji Hasegawa, Masayoshi Sagehashi, Takayuki Nagasawa | 2019-07-30 |
| 10323113 | Resist composition and patterning process | Jun Hatakeyama, Takayuki Fujiwara, Masahiro Fukushima, Kazuya Honda | 2019-06-18 |
| 10295904 | Resist composition and patterning process | Jun Hatakeyama | 2019-05-21 |
| 10248022 | Sulfonium compound, making method, resist composition, and pattern forming process | Ryosuke Taniguchi | 2019-04-02 |
| 10234757 | Polymer, making method, resist composition, and patterning process | Tomohiro Kobayashi | 2019-03-19 |
| 10222696 | Resist composition and patterning process | Jun Hatakeyama | 2019-03-05 |
| 10180626 | Sulfonium salt, resist composition, and patterning process | Takayuki Fujiwara, Ryosuke Taniguchi | 2019-01-15 |
| 10173975 | Sulfonium compound, resist composition, and pattern forming process | Takayuki Fujiwara, Ryosuke Taniguchi, Kazuya Honda, Takahiro Suzuki | 2019-01-08 |