Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10323113 | Resist composition and patterning process | Jun Hatakeyama, Masaki Ohashi, Takayuki Fujiwara, Masahiro Fukushima | 2019-06-18 |
| 10173975 | Sulfonium compound, resist composition, and pattern forming process | Masaki Ohashi, Takayuki Fujiwara, Ryosuke Taniguchi, Takahiro Suzuki | 2019-01-08 |