Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10310376 | Resist composition, pattern forming process, polymer, and monomer | Teppei Adachi, Koji Hasegawa, Kenji Yamada | 2019-06-04 |
| 10248022 | Sulfonium compound, making method, resist composition, and pattern forming process | Masaki Ohashi | 2019-04-02 |
| 10180626 | Sulfonium salt, resist composition, and patterning process | Takayuki Fujiwara, Masaki Ohashi | 2019-01-15 |
| 10173975 | Sulfonium compound, resist composition, and pattern forming process | Masaki Ohashi, Takayuki Fujiwara, Kazuya Honda, Takahiro Suzuki | 2019-01-08 |