Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10323113 | Resist composition and patterning process | Jun Hatakeyama, Masaki Ohashi, Masahiro Fukushima, Kazuya Honda | 2019-06-18 |
| 10180626 | Sulfonium salt, resist composition, and patterning process | Masaki Ohashi, Ryosuke Taniguchi | 2019-01-15 |
| 10173975 | Sulfonium compound, resist composition, and pattern forming process | Masaki Ohashi, Ryosuke Taniguchi, Kazuya Honda, Takahiro Suzuki | 2019-01-08 |