Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504742 | Method of atomic layer etching using hydrogen plasma | Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Takayoshi Tsutsumi | 2019-12-10 |
| 10418254 | Etching method and etching apparatus | Kazunori Shinoda, Naoyuki Kofuji, Hiroyuki Kobayashi, Nobuya Miyoshi, Kohei Kawamura +2 more | 2019-09-17 |
| 10325781 | Etching method and etching apparatus | Kazunori Shinoda, Satoshi Sakai, Masaru Izawa, Nobuya Miyoshi, Hiroyuki Kobayashi +2 more | 2019-06-18 |
| 10312054 | Radical generator and molecular beam epitaxy apparatus | Osamu Oda, Hiroyuki Kano | 2019-06-04 |
| 10283353 | Method of reforming insulating film deposited on substrate with recess pattern | Akiko Kobayashi, Masaru Zaitsu, Nobuyoshi Kobayashi | 2019-05-07 |