Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504742 | Method of atomic layer etching using hydrogen plasma | Masaru Zaitsu, Nobuyoshi Kobayashi, Masaru Hori, Takayoshi Tsutsumi | 2019-12-10 |
| 10378106 | Method of forming insulation film by modified PEALD | Akira Shimizu, Nobuyoshi Kobayashi, Woo Jin Lee | 2019-08-13 |
| 10283353 | Method of reforming insulating film deposited on substrate with recess pattern | Masaru Zaitsu, Nobuyoshi Kobayashi, Masaru Hori | 2019-05-07 |
| 10258456 | Cell-containing sheet | Ikuo Morita, Hideshi Hattori, Masatoshi Kuroda | 2019-04-16 |
| 10219888 | Cell-containing sheet | Ikuo Morita, Hideshi Hattori, Masatoshi Kuroda | 2019-03-05 |