Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504742 | Method of atomic layer etching using hydrogen plasma | Masaru Zaitsu, Akiko Kobayashi, Masaru Hori, Takayoshi Tsutsumi | 2019-12-10 |
| 10378106 | Method of forming insulation film by modified PEALD | Akiko Kobayashi, Akira Shimizu, Woo Jin Lee | 2019-08-13 |
| 10373640 | Information processing device, information processing method, and program | Kimihiro Saito, Kenji Yamamoto, Noriaki Nishi, Junya Shiraishi | 2019-08-06 |
| 10283353 | Method of reforming insulating film deposited on substrate with recess pattern | Akiko Kobayashi, Masaru Zaitsu, Masaru Hori | 2019-05-07 |